@ARTICLE{Seo_Minhye_Effect_2019,
 author={Seo, Minhye and Lee, Soo-Young and Cho, Sung-Su and Song, Hyoung Woon and Kim, Hyun-Kyung and Kim, Dong Soo and Lee, Sungkyu},
 volume={vol. 64},
 number={No 2},
 journal={Archives of Metallurgy and Materials},
 pages={695-700},
 howpublished={online},
 year={2019},
 publisher={Institute of Metallurgy and Materials Science of Polish Academy of Sciences},
 publisher={Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences},
 abstract={Mordenite-zeolite supported Ca-Cu and Ba-Cu catalysts (Ca-Cu/MOR and Ba-Cu MOR) were successfully fabricated for direct decomposition of both NF3 and N2O gases contained in waste gas stream of (semiconductor) electronics industry. N2O conversion rates of Ca-Cu and Ba-Cu catalysts were 79 and 86%, respectively, at 700°C and 1 atm under space velocity of 5000 h–1. The Ca-Cu catalyst was especially noteworthy in that its capability of converting N2O could be maintained even after its exposure to co-feeding NF3 gas constituent in the waste gas stream. Compositional and surface morphological analyses of the Ca-Cu and Ba-Cu catalysts were made before and after exposure to the waste gas stream to examine any noticeable degradation or change of the catalysts. Unlike Ba-Cu catalyst, SiO2 constituent of the Ca-Cu catalyst was found to remain immune to the NF3-cofeeding waste gas stream, casting a positive prospect for superior and steady N2O decomposition performance via maintenance of its structural integrity.},
 type={Artykuły / Articles},
 title={Effect of NF3 Gas on Stabilization of Alkaline Earth Metal-CU Mordenite Catalysts During N2O Decomposition Reaction},
 URL={http://ochroma.man.poznan.pl/Content/111340/PDF/AMM-2019-2-43-Sungkyu.pdf},
 doi={10.24425/amm.2019.127600},
 keywords={nitrous oxide (N2O), nitrofluorine three (NF3), perfluorocompounds (PFCs), direct decomposition, catalyst},
}