@ARTICLE{Kucharski_D._A_2020,
 author={Kucharski, D. and Zdunek, H.},
 volume={68},
 number={48},
 journal={Bulletin of the Polish Academy of Sciences Technical Sciences},
 pages={485-490},
 howpublished={online},
 year={2020},
 abstract={We present a prototype of a simple, low-cost setup for a fast scatterometric surface texture measurements. We used a total integrated scatter method (TIS) with a semiconductor laser (λ =  638 nm) and a Si photodiode. Using our setup, we estimated the roughness parameters Rq for two reference surfaces (Al mirrors with flatness λ/10) and seven equal steel plates to compare. The setup is easily adaptable for a fast, preliminary manufacturing quality control. We show is possible to construct a low-cost measurement system with nanometric precision.},
 type={Article},
 title={A low-cost, simple optical setup for a fast scatterometry surface roughness measurements with nanometric precision},
 URL={http://ochroma.man.poznan.pl/Content/116520/PDF/10_485-490_01475_Bpast.No.68-3_30.06.20_K3A_TeX.pdf},
 doi={10.24425/bpasts.2020.133364},
 keywords={scatterometry, surface texture, optical measurement systems, surface metrology, surface roughness},
}