@ARTICLE{Grzebyk_T._Vacuum_2012,
 author={Grzebyk, T. and Górecka-Drzazga, A.},
 volume={60},
 number={No 1},
 journal={Bulletin of the Polish Academy of Sciences Technical Sciences},
 pages={19-23},
 howpublished={online},
 year={2012},
 title={Vacuum microdevices},
 URL={http://ochroma.man.poznan.pl/Content/83459/PDF/04_paper.pdf},
 doi={10.2478/v10175-012-0004-y},
}