Title

The Effect of Humidity on the Stability of LTCC Pressure Sensors

Journal title

Metrology and Measurement Systems

Yearbook

2012

Issue

No 1

Authors

Belavič, Darko ; Zarnik, Marina

Keywords

Thick-film piezoresistive sensors ; capacitive pressure sensors ; offset stability ; relative humidity

Divisions of PAS

Nauki Techniczne

Coverage

133-140

Publisher

Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation

Date

2012

Type

Artykuły / Articles

Identifier

DOI: 10.2478/v10178-012-0012-0 ; ISSN 2080-9050, e-ISSN 2300-1941

Source

Metrology and Measurement Systems; 2012; No 1; 133-140

References

Birol H. (2007), Fabrication of a millinewton force sensor using low temperature co-fired ceramic (LTCC) technology, Sensors and Actuaors A, 134, 334, doi.org/10.1016/j.sna.2006.05.025 ; Partsch U. (2007), A new concept for LTCC-based pressure sensors, null. ; Zarnik M. (2009), Feasibility study of a thick-film PZT resonant pressure sensor made on a prefired 3D LTCC structure, International journal of applied ceramic technology, 6, 1, 9, doi.org/10.1111/j.1744-7402.2008.02322.x ; Kita J. (2008), Development of LTCC-materials and their application - an overview, Information MIDEM, 38, 4, 219. ; Golonka L. (2006), LTCC microfluidic system, Int. J. Appl. Ceram. Technol, 3, 2, 150, doi.org/10.1111/j.1744-7402.2006.02072.x ; Belavič D. (2008), Capacitive pressure sensors realized with LTCC technology, null, 271. ; Belavič D. (2009), Temperature behaviour of capacitive pressure sensor fabricated with LTCC technology, Information MIDEM, 38, 3, 191. ; Zarnik M. (2010), Information MIDEM, 40, 1, 74. ; Zarnik M. (2011), Design study for a capacitive ceramic pressure sensor, Microelectronics International, 28, 3, 31, doi.org/10.1108/13565361111162602 ; Marghescu C. (2010), FE modeling of capacitive pressure sensor realized in LTCC technology, null. ; Ionescu C. (2009), The design and improvement of LTCC-based capacitive pressure sensors employing finite element analysis, null. ; Zarnik M. (2011), Experimental and numerical study of the humidity and moisture effect on the stability of an air-gap capacitor in a 3D LTCC structure, null, 62. ; Zarnik M. (2009), Investigation of a thick-film capacitive pressure sensor in a three-dimensional LTCC structure, null, 371. ; Zarnik M. (2010), The warm-up and offset stability of a low-pressure piezoresistive ceramic pressure sensor, Sensors and actuators, A, 158, 2, 198, doi.org/10.1016/j.sna.2009.12.035 ; Zarnik M. (2010), Some Critical Steps in the Manufacturing of LTCC-based Pressure Sensors, null, 303.