Title

Construction Of A Piezoelectric-Based Resonance Ceramic Pressure Sensor Designed For High-Temperature Applications

Journal title

Metrology and Measurement Systems

Yearbook

2015

Volume

vol. 22

Issue

No 3

Authors

Belavič, Darko ; Bradeško, Andraž ; Zarnik, Marina Santo ; Rojac, Tadej

Keywords

LTCC ; piezoelectric ; pressure sensor

Divisions of PAS

Nauki Techniczne

Coverage

331-340

Publisher

Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation

Date

2015[2015.01.01 AD - 2015.12.31 AD]

Type

Artykuły / Articles

Identifier

DOI: 10.1515/mms-2015-0034 ; ISSN 2080-9050, e-ISSN 2300-1941

Source

Metrology and Measurement Systems; 2015; vol. 22; No 3; 331-340

References

Belavič (2014), An overview of LTCC based ceramic microsystems : from simple pressure sensors to complex chemical reactors of EDS Electronic Devices and Systems IMAPS CS International Conference XVI XXI , CD - ROM, Proc, 14. ; Santo Zarnik (2009), Feasibility study of a thick - film PZT resonant pressure sensor made on a prefired LTCC structure of applied ceramic technology, International journal, 6, 9. ; Belavič (2008), Piezoresistive piezoelectric and capacitive pressure sensors Tutorial : Ceramic pressure sensors from materials to devices of th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, Proc. ; Belavič (2007), The application of thick - film technology in C - MEMS, Journal, 19. ; Partsch (2007), A new concept for LTCC - based pressure sensors of rd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies CD - ROM, Proc, 367. ; Belavič (2007), Benchmarking different types of thick - film pressure sensors of rd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies CD - ROM, Proc, 278.