Title

THE MORPHOLOGY AND STRUCTURE OF ZnO THIN FILMS DEPOSITED BY ALD METHOD

Journal title

Archives of Metallurgy and Materials

Yearbook

2018

Volume

vol. 63

Issue

No 1

Authors

Boryło, P. ; Gołombek, K. ; Matus, K. ; Lukaszkowicz, K.

Keywords

ALD ; ZnO ; SEM ; TEM ; UV/VIS

Divisions of PAS

Nauki Techniczne

Publisher

Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences

Date

2018-03-06

Type

Artykuły / Articles

Identifier

DOI: 10.24425/118919 ; e-ISSN 2300-1909

Source

Archives of Metallurgy and Materials; 2018; vol. 63; No 1