Szczegóły

Tytuł artykułu

A stack multilayer high reflectance optical filter produced on polyester substrate with the PECVD technique

Tytuł czasopisma

Bulletin of the Polish Academy of Sciences Technical Sciences

Rocznik

2009

Wolumin

vol. 57

Numer

No 2

Autorzy

Wydział PAN

Nauki Techniczne

Zakres

171-176

Data

2009

Identyfikator

DOI: 10.2478/v10175-010-0118-z ; ISSN 2300-1917

Źródło

Bulletin of the Polish Academy of Sciences: Technical Sciences; 2009; vol. 57; No 2; 171-176

Referencje

Larouche S. (2004), Microstructure of plasma-deposited SiO<sub>2</sub>/TiO<sub>2</sub> optical films, J. Vac. Sci. Techn, A 22, 4, 1200. ; Gruniger A. (2003), Deposition of SiO<sub>2</sub>-like diffusion barriers on PET and paper by PECVD, Surf. Coat. Techn, 174-175, 1043, doi.org/10.1016/S0257-8972(03)00327-X ; Bieder A. (2005), Deposition of SiO<sub>x</sub> diffusion barriers on flexible packaging materials by PECVD, Surf. Coat. Techn, 200, 928, doi.org/10.1016/j.surfcoat.2005.02.004 ; Martin-Palma R. (2006), Optical and compositional analysis of functional SiO<sub>x</sub>C<sub>y</sub>:H coatings on polymers, Thin Solid Films, 515, 2493, doi.org/10.1016/j.tsf.2006.07.082 ; Masse J. (2006), Stability and effect of annealing on the optical properties of plasma-deposited Ta<sub>2</sub>O<sub>5</sub> and Nb<sub>2</sub>O<sub>5</sub> films, Thin Solid Films, 515, 1674, doi.org/10.1016/j.tsf.2006.05.047 ; Palma R. (2006), Optical and compositional analysis of functional SiO<sub>x</sub>C<sub>y</sub>:H coatings on polymers, Thin Solid Films, 515, 2493. ; Bauer S. (2003), Optical multilayers for ultra-narrow bandpass filters fabricated by PICVD, Thin Solid Films, 442, 189, doi.org/10.1016/S0040-6090(03)00981-7 ; Jaworske D. (1998), Characterization of silicon thin film deposited by e-beam, Thin Solid Films, 332, 30. ; Neuman G. (1997), The use of experimental design techniques to meet reflected color targets in pyrolytic low emissivity coatings, Thin Solid Films, 308-309, 26, doi.org/10.1016/S0040-6090(97)00532-4 ; Eliahou-Niv S. (2006), Design and analysis of a novel tunable optical filter, Microelectr. J, 37, 302, doi.org/10.1016/j.mejo.2005.05.018
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