Title

Structure and Electrical Resistivity Dependence of Molybdenum Thin Films Deposited by DC Modulated Pulsed Magnetron Sputtering

Journal title

Archives of Metallurgy and Materials

Yearbook

2018

Volume

vol. 63

Issue

No 3

Authors

Wicher, B. ; Chodun, R. ; Nowakowska-Langier, K. ; Okrasa, S. ; Król, K. ; Minikayev, R. ; Strzelecki, G. ; Zdunek, K.

Keywords

magnetron sputtering ; modulated pulse magnetron sputtering ; plasma&films characterization

Divisions of PAS

Nauki Techniczne

Coverage

1339-1344

Publisher

Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences

Date

2018.10.10

Type

Artykuły / Articles

Identifier

DOI: 10.24425/123809 ; e-ISSN 2300-1909

Source

Archives of Metallurgy and Materials; 2018; vol. 63; No 3; 1339-1344