Title

Conductive atomic force microscope for investigation of thin-film gate insulators

Journal title

Bulletin of the Polish Academy of Sciences Technical Sciences

Yearbook

2008

Volume

vol. 56

Issue

No 1

Authors

Wielgoszewski, G. ; Gotszalk, T. ; Woszczyna, M. ; Zawierucha, P. ; Zschech, E.

Keywords

AFM ; conductive probe ; thin-film oxides annealing

Divisions of PAS

Nauki Techniczne

Coverage

39-44

Date

2008

Type

Artykuły / Articles

Identifier

ISSN 2300-1917

Source

Bulletin of the Polish Academy of Sciences: Technical Sciences; 2008; vol. 56; No 1; 39-44