Title

Applications of the LTCC ceramics in microplasma systems

Journal title

Metrology and Measurement Systems

Yearbook

2019

Volume

vol. 26

Issue

No 4

Authors

Macioszczyk, Jan ; Golonka, Leszek

Keywords

microplasma ; Low-Temperature Co-fired Ceramics ; microsystems

Divisions of PAS

Nauki Techniczne

Coverage

713-724

Publisher

Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation

Date

2019.12.28

Type

Article

Identifier

DOI: 10.24425/mms.2019.130564

Source

Metrology and Measurement Systems; 2019; vol. 26; No 4; 713-724