Details Details PDF BIBTEX RIS Title Electrical Characteristics of Tin Oxide Films Grown by Thermal Atomic Layer Deposition Journal title Archives of Metallurgy and Materials Yearbook 2020 Volume vol. 65 Issue No 3 Authors Yoon, Seong Yu ; Choi, Byung Joon Keywords Atomic layer deposition ; tin oxide ; electrical property ; oxygen adsorption Divisions of PAS Nauki Techniczne Coverage 1041-1044 Publisher Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences Date 2020.07.08 Type Article Identifier DOI: 10.24425/amm.2020.133214 Source Archives of Metallurgy and Materials; 2020; vol. 65; No 3; 1041-1044