Details
Title
Metrology and control of electromagnetically actuated cantilevers using optical beam deflection methodJournal title
Metrology and Measurement SystemsYearbook
2021Volume
vol. 28Issue
No 4Affiliation
Kopiec, Daniel : Wrocław University of Technology, Faculty of Microsystems Electronics and Photonics, Department of Nanometrology, Janiszewskiego 11/17, Wrocław 50-372, Poland ; Majstrzyk, Wojciech : Łukasiewicz Research Network, Institute of Microelectronics and Fotonics, Lotników 32/46, Warsaw 02-668, Poland ; Pruchnik, Bartosz : Wrocław University of Technology, Faculty of Microsystems Electronics and Photonics, Department of Nanometrology, Janiszewskiego 11/17, Wrocław 50-372, Poland ; Gacka, Ewelina : Wrocław University of Technology, Faculty of Microsystems Electronics and Photonics, Department of Nanometrology, Janiszewskiego 11/17, Wrocław 50-372, Poland ; Badura, Dominik : Wrocław University of Technology, Faculty of Microsystems Electronics and Photonics, Department of Nanometrology, Janiszewskiego 11/17, Wrocław 50-372, Poland ; Sierakowski, Andrzej : Łukasiewicz Research Network, Institute of Microelectronics and Fotonics, Lotników 32/46, Warsaw 02-668, Poland ; Janus, Paweł : Łukasiewicz Research Network, Institute of Microelectronics and Fotonics, Lotników 32/46, Warsaw 02-668, Poland ; Gotszalk, Teodor : Wrocław University of Technology, Faculty of Microsystems Electronics and Photonics, Department of Nanometrology, Janiszewskiego 11/17, Wrocław 50-372, PolandAuthors
Keywords
optical beam deflection ; thermomechanical noise ; low frequency noise ; electromagnetically actuated cantilever ; Lorentz forceDivisions of PAS
Nauki TechniczneCoverage
627-642Publisher
Polish Academy of Sciences Committee on Metrology and Scientific InstrumentationBibliography
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