Details
Title
Finite Element Analysis of SAW Sensor with ZnO Substrate for Dichloromethane (DCM) Gas DetectionJournal title
Archives of AcousticsYearbook
2021Volume
vol. 46Issue
No 3Affiliation
Moustafa, Mohamed : Department of Physics, School of Sciences and Engineering, The American University in Cairo, Egypt ; Laouini, Ghaylen : College of Engineering and Technology, American University of the Middle East, Kuwait ; Alzoubi, Tariq : College of Engineering and Technology, American University of the Middle East, KuwaitAuthors
Keywords
surface acoustic wave (SAW) ; gas sensors ; VOCs ; FEM modellingDivisions of PAS
Nauki TechniczneCoverage
419-426Publisher
Polish Academy of Sciences, Institute of Fundamental Technological Research, Committee on AcousticsBibliography
1. Aslam M.Z., Jeoti V., Karuppanan S., Malik A., Iqbal A. (2018), FEM analysis of Sezawa Mode SAW sensor for VOC based on CMOS compatible AlN/ SiO2/Si, Multilayer Structure. Sensors, 18(6): 1687, doi: 10.3390/s18061687.2. Beauchet R., Magnoux P., Mijoin J. (2007), Catalytic oxidation of volatile organic compounds (VOCs) mixture (isopropanol/O-xylene) on zeolite catalysts, Catalysis Today, 124(3–4): 118–123, doi: 10.1016/ j.cattod.2007.03.030.
3. Caliendo C., Laidoudi F. (2020), Experimental and theoretical study of multifrequency surface acoustic wave devices in a single Si/SiO2/ZnO piezoelectric structure, Sensors, 20(5): 1380, doi: 10.3390/s20051380.
4. Carlotti G., Socino G., Petri A., Verona E. (1987), Elastic constants of sputtered ZnO films, Proceedings of IEEE 1987 Ultrasonics Symposium, pp. 295–300, doi: 10.1109/ULTSYM.1987.198972.
5. Deng Q., Yang X., Zhang J.S. (2012), Key factor analysis of VOC sorption and its impact on indoor concentrations: the role of ventilation, Building and Environment, 47: 182–187, doi: 10.1016/j.buildenv.2011.07.026.
6. El-Shennawy K., Orabi M.S, Taha T.E. (2000), Simulation of high sensitivity and stability surface acoustic wave NO2 gas sensor based on amplitude variations as measurand, 22nd International Conference on Microelectronics, Vol. 2, pp. 611–614.
7. Gowini M., Moussa W. (2010), A Finite Element Model of a MEMS-based Surface Acoustic Wave hydrogen sensor, Sensors, 10(2): 1232–1250, doi: 10.3390/s100201232.
8. Gualtieri J.G., Kosinski J.A., Ballato A. (1994), Piezoelectric materials for acoustic wave applications, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 41(1): 53–59, doi: 10.1109/58.265820.
9. Guo Y.J. et al. (2015), Ultraviolet sensing based on nanostructured ZnO/Si surface acoustic wave devices, Smart Materials and Structures, 24(12): 125015, doi: 10.1088/0964-1726/24/12/125015.
10. Hands P.J.W., Laughlin P.J., Bloor D. (2012), Metal–polymer composite sensors for volatile organic compounds. Part 1. Flow-through chemi-resistors, Sensors and Actuators B: Chemical, 162(1): 400–408, doi: 10.1016/j.snb.2011.12.016.
11. Hernandez G., Wallis S.L., Graves I., Narain S., Birchmore R., Berry T-A. (2020), The effect of ventilation on volatile organic compounds produced by new furnishings in residential buildings, Atmospheric Environment: X, 6: 10069, doi: 10.1016/j.aeaoa.2020.100069.
12. Hofer M. et al. (2006), Finite-element simulation of wave propagation in periodic piezoelectric SAW structures, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 53(6): 1192–1201, doi: 10.1109/tuffc.2006.1642518
13. Horrillo M.C. et al. (2006), Optimization of SAW sensors with a structure ZnO-SiO2-Si to detect volatile organic compounds, Sensors and Actuators B: Chemical, 118(1–2): 356–361, doi: 10.1016/j.snb.2006.04.050.
14. Huang H., Chiang H., Wu C., Lin Y., Shen Y. (2019), Analysis on characteristics of ZnO surface acoustic wave with and without micro-structures, Micromachines (Basel), 10(7): 434, doi: 10.3390/mi10070434.
15. Jang S.W. et al. (2006), Refractive index change by photoinduction of a UV-sensitive SMF-to-PWG coupler. IEEE Photonics Technology Letters, 18(1): 220– 222, doi: 10.1109/LPT.2005.861624.
16. Jiang Q., Yang X.M, Zhou H.G, Yang J.S. (2005), Analysis of surface acoustic wave pressure sensors, Sensors and Actuators A: Physical, 118(1): 1–5, doi: 10.1016/j.sna.2004.07.007.
17. Joo B.-S., Lee J.-H., Lee E.-W., Song K.-D., Lee D.-D. (2005), Polymer film SAW sensors for chemical agent detection, [in:] Proceedings of the 1st Conference on Sensing Technology, Palmerston North, New Zealand, pp. 307–310.
18. Karpina V.A. et al. (2004), Zinc oxide – analogue of GaN with new perspective possibilities, Crystal Research and Technology, 39(11): 980–992, doi: 10.1002/crat.200310283.
19. Koistinen K. et al. (2008), The INDEX project: executive summary of a European Union project on indoor air pollutants, Allergy, 63(7): 810–819, doi: 10.1111/j.1398-9995.2008.01740.x.
20. Kumar S., Kim G.H., Sreenivas K., Tandon R.P. (2009), ZnO based surface acoustic wave ultraviolet photo sensor, Journal of Electroceramics, 22(1): 198– 202, doi: 10.1007/s10832-007-9409-7.
21. Lin H., Jang M., Suslick K.S. (2011), Preoxidation for colorimetric sensor array detection of VOCs, Journal of the American Chemical Society, 133(42): 16786–16789, doi: 10.1021/ja207718t.
22. Le Brizoual L., Elmazria O., Sarry F., El Hakiki M., Talbi A., Alno P. (2006), High frequency SAW devices based on third harmonic generation, Ultrasonics, 45(1–4): 100–103, doi: 10.1016/j.ultras.2006.07.013.
23. Leonhard M., Ismail M. (2004), Wireless measurement of temperature using surface acoustic waves sensors, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 51(11): 1457–1463, doi: 10.1109/TUFFC.2004.1367486.
24. Lerch R. (1990), Simulation of piezoelectric devices by two- and three-dimensional finite elements, IEEE transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 37(3): 233–247, doi: 10.1109/58.55314.
25. Liu X., Cheng S., Liu H., Hu S., Zhang D., Ning H. (2012), A survey on gas sensing technology, Sensors (Basel), 12(7): 9635–9665, doi: 10.3390/s120709635.
26. Ma W., Yang H., Wang W., Gao P., Yao J. (2011), Ethanol vapor sensing properties of triangular silver nanostructures based on localized surface plasmon resonance, Sensors, 11(9): 8643–8653, doi: 10.3390/s110908643.
27. Mombello D. et al. (2009), Porous anodic alumina for the adsorption of volatile organic compounds, Sensrs and Actuators B: Chemical, 137(1): 76–82, doi: 10.1016/j.snb.2008.11.046.
28. Ondo-Ndong R., Ferblantier G., Al Kalfioui M., Boyer A., Foucaran A. (2002), Properties of RF magnetron sputtered zinc oxide thin films, Journal of Crystal Growth, 255(1–2): 130–135, doi: 10.1016/S0022-0248(03)01243-0.
29. Ondo J., Blampain E., Mbourou G., Mc Murtry S., Hage-Ali S., Elmazria O. (2020), FEM modeling of the temperature influence on the performance of SAW sensors operating at gigahertz frequency range and at high temperature up to 500XC, Sensors (Basel), 20(15): 4166, doi: 10.3390/s20154166.
30. Özgür Ü. et al. (2005), A comprehensive review of ZnO materials and devices, Journal of Applied Physics, 98(4): 041301, doi: 10.1063/1.1992666.
31. Raj V.B., Singh H., Nimal A.T., Sharma M.U., Tomar M., Gupta V. (2017), Distinct detection of liquor ammonia by ZnO/SAW sensor: Study of complete sensing mechanism, Sensors and Actuators B: Chemical, 238: 83–90, doi: 10.1016/j.snb.2016.07.040.
32. Roesch C., Kohajda T., Roeder S., von Bergen M., Schlink U. (2014), Relationship between sources and patterns of VOCs in indoor air, Atmospheric Pollution Research, 5(1): 129–137, doi: 10.5094/APR.2014.016.
33. Sua F.-C., Mukherjeeb B., Battermana S. (2013), Determinants of personal, indoor and outdoor VOC concentrations: An analysis of the RIOPA data, Environmental Research, 126: 192–203, doi: 10.1016/j.envres.2013.08.005.
34. Tang I.-T., Chen H.-J., Hwang W.C., Wang Y.C., Houng M.-P., Wang Y.-H. (2004), Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter, Journal of Crystal Growth, 262(1–4): 461– 466, doi: 10.1016/j.jcrysgro.2003.10.081.
35. Tonami S., Nishikata A., Shimizu Y. (1995), Characteristic of leaky surface acoustic wave propagating on LiNbO3 and LiTaO3 substrates, Japanese Journal of Applied Physics, 34(Part 1, No. 5B): 2664–2667, doi: 10.1143/jjap.34.2664.
36. Wang Z.L. (2004), Zinc oxide nanostructures: growth, properties and applications, Journal of Physics: Condensed Matter, 16(25): R829–R858, doi: 10.1088/0953- 8984/16/25/R01.
37. Wongchoosuk C., Wisitsoraat A., Tuantranont A., Kerdcharoen T. (2010), Portable electronic nose based on carbon nanotube-SnO2 gas sensors and its application for detection of methanol contamination in whiskeys, Sensors and Actuators B: Chemical, 147(2): 392–399, doi: 10.1016/j.snb.2010.03.072.
38. Yoon J.K., Seo G.W., Cho K.M., Kim E.S., Kim S.H., Kang S.W. (2003), Controllable in-line UV sensor using a side-polished fiber coupler with photofunctional polymer, IEEE Photonics Technology Letters, 15(6): 837–839, doi: 10.1109/LPT.2003.811341.