Tytuł artykułu

Generation of Large-area Arrays of Aperiodic Functional Micro/nano Structures Using Phase Shift Interferometry

Tytuł czasopisma

International Journal of Electronics and Telecommunications

Rocznik

2022

Wolumin

vol. 68

Numer

No 1

Afiliacje

Princess. J, Pearly : Karunya Institute of Technology and Sciences, Karunya Nagar, India ; Kirubaraj, A. Alfred : Karunya Institute of Technology and Sciences, Karunya Nagar, India ; Sophia, S. Christina : Karunya Institute of Technology and Sciences, Karunya Nagar, India ; Senith, S. : Karunya Institute of Technology and Sciences, Karunya Nagar, India ; Jino Ramson, S.R. : VIT Bhopal University, Bhopal, India

Autorzy

Princess. J, Pearly ; Kirubaraj, A. Alfred ; Sophia, S. Christina ; Senith, S. ; Jino Ramson, S.R.

Słowa kluczowe

laser interference lithography (LIL) ; pattern structures ; periodic and aperiodic pattern ; phase shift interferometry (PSI)

Wydział PAN

Nauki Techniczne

Zakres

91-96

Wydawca

Polish Academy of Sciences Committee of Electronics and Telecommunications

Data

2022.03.30

Typ

Article

Identyfikator

DOI: 10.24425/ijet.2022.139853 ; eISSN 2300-1933 (since 2013) ; ISSN 2081-8491 (until 2012)