Title

Generation of Large-area Arrays of Aperiodic Functional Micro/nano Structures Using Phase Shift Interferometry

Journal title

International Journal of Electronics and Telecommunications

Yearbook

2022

Volume

vol. 68

Issue

No 1

Affiliation

Princess. J, Pearly : Karunya Institute of Technology and Sciences, Karunya Nagar, India ; Kirubaraj, A. Alfred : Karunya Institute of Technology and Sciences, Karunya Nagar, India ; Sophia, S. Christina : Karunya Institute of Technology and Sciences, Karunya Nagar, India ; Senith, S. : Karunya Institute of Technology and Sciences, Karunya Nagar, India ; Jino Ramson, S.R. : VIT Bhopal University, Bhopal, India

Authors

Princess. J, Pearly ; Kirubaraj, A. Alfred ; Sophia, S. Christina ; Senith, S. ; Jino Ramson, S.R.

Keywords

laser interference lithography (LIL) ; pattern structures ; periodic and aperiodic pattern ; phase shift interferometry (PSI)

Divisions of PAS

Nauki Techniczne

Coverage

91-96

Publisher

Polish Academy of Sciences Committee of Electronics and Telecommunications

Date

2022.03.30

Type

Article

Identifier

DOI: 10.24425/ijet.2022.139853