Details Details PDF BIBTEX RIS Title Structural, Electrical, and Optical Properties of ZnO Films Grown by Atomic Layer Deposition at Low Temperature Journal title Archives of Metallurgy and Materials Yearbook 2022 Volume vol. 67 Issue No 4 Affiliation Park, Ji Young : Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul, Korea ; Weon, Ye Bin : Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul, Korea ; Jung, Myeong Jun : Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul, Korea ; Choi, Byung Joon : Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul, Korea Authors Park, Ji Young ; Weon, Ye Bin ; Jung, Myeong Jun ; Choi, Byung Joon Keywords Zinc Oxide (ZnO) ; Atomic layer deposition ; Low temperature growth ; Optoelectronic properties Divisions of PAS Nauki Techniczne Coverage 1503-1506 Publisher Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences Date 2022.11.23 Type Article Identifier DOI: 10.24425/amm.2022.141082