Title

Experimental study of non-measured points on surface measurement using structured illumination microscopy

Journal title

Metrology and Measurement Systems

Yearbook

2022

Volume

vol. 29

Issue

No 4

Affiliation

Li, Zhen : Chemnitz University of Technology, Department of Production Measuring Technology, Reichenhainer Straße 70, 09126 Chemnitz, Germany ; Gröger, Sophie : Chemnitz University of Technology, Department of Production Measuring Technology, Reichenhainer Straße 70, 09126 Chemnitz, Germany

Authors

Li, Zhen ; Gröger, Sophie

Keywords

non-measured points ; structured illumination microscopy ; areal surface texture parameters ; measurement uncertainty

Divisions of PAS

Nauki Techniczne

Coverage

763-778

Publisher

Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation

Date

2022.12.13

Type

Article

Identifier

DOI: 10.24425/mms.2022.143071