Details Details PDF BIBTEX RIS Title Application of Al 2O 3 ZnO, and TiO 2 ALD thin films as antireflection coating in the silicon solar cells Journal title Opto-Electronics Review Yearbook 2023 Volume 31 Issue 4 Affiliation Szindler, Marek : Scientific and Didactic Laboratory of Nanotechnology and Material Technologies, Faculty of Mechanical Engineering, Silesian University of Technology, ul. Towarowa 7, 44-100 Gliwice, Poland ; Szindler, Magdalena M. : Department of Engineering Materials and Biomaterials, Faculty of Mechanical Engineering, Silesian University of Technology, ul. Konarskiego 18a, 44-100 Gliwice, Poland Authors Szindler, Marek ; Szindler, Magdalena M. Keywords optical thin film ; antireflection coating ; atomic layer deposition ; solar cells Divisions of PAS Nauki Techniczne Coverage e148223 Publisher Polish Academy of Sciences (under the auspices of the Committee on Electronics and Telecommunication) and Association of Polish Electrical Engineers in cooperation with Military University of Technology Date 05.11.2023 Type Article Identifier DOI: 10.24425/opelre.2023.148223