Details Details PDF BIBTEX RIS Title One-axis micro-electromechanical accelerometer with enhanced sensitivity Journal title Archive of Mechanical Engineering Yearbook 2025 Volume vol. 72 Issue No 2 Authors Nguyen, Van Cuong ; Nguyen, Van Duong ; Bui, Manh Cuong ; Chu, Manh Hoang Affiliation Nguyen, Van Cuong : Faculty of Mechanical Engineering, Le Quy Don Technical University, Hanoi, Vietnam ; Nguyen, Van Duong : FPT University, Hoa Lac High Tech Park, Hanoi, Vietnam ; Bui, Manh Cuong : Faculty of Mechanical Engineering, Le Quy Don Technical University, Hanoi, Vietnam ; Chu, Manh Hoang : School of Materials Science and Engineering, Hanoi University of Science and Technology, Hanoi, Vietnam Keywords one-axis accelerometer ; air damping ; electrostatic tuning ; enhanced sensitivity Divisions of PAS Nauki Techniczne Coverage 311-332 Publisher Polish Academy of Sciences, Committee on Machine Building Date 3.07.2025 Type Article Identifier DOI: 10.24425/ame.2025.154738 ; ISSN 0004-0738, e-ISSN 2300-1895